摘要 |
PURPOSE:To make it possible to obtain accurate measured value by avoiding measuring obstruction caused by secondary reflected beam, by confirming an imaginary measured value due to the secondary reflected beam of signal laser beam and an actually measured value due to primary reflected beam and discarding the former while taking the latter. CONSTITUTION:A beam emitter L and a beam receiver R are respectively provided at two points OL, OR on a visual sensor main body G. The beam emitter L emits signal laser beam l performing angular vibration around the point OL to project the same to an object and a bright spot A is generated at the projection point to scan the surface of the object. A signal beam control circuit MthetaL imparting angular vibration to the beam l is provided at the side of the beam emitter L and sends out a signal (j) relating to the direction OL of the beam l to a microprocessor mu-PR. A signal component detection circuit MthetaR is provided at the side of the beam receiver R and detects a light receiving element outputting a signal beam component and sends out a signal (i) showing the element number (i) thereof to the microprocessor mu-PR. The microprocessor mu-PR writes the signals (i), (j) corresponding to each other in a memory MEMO and further processes the written data and discards an imaginary measured value while picking up an actually measured value to calculate the surface shape of the matter. |