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发明名称
ALIGNER OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS62171200(A)
申请公布日期
1987.07.28
申请号
JP19860012098
申请日期
1986.01.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAUCHI YUKIO
分类号
H01L21/68;H01L21/67;H05K13/04
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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