发明名称 COMPOSITE BODY HAVING CARBON FILM
摘要 PURPOSE:To improve the adhesion and hardness of the film of the resulting composite body by forming a film of microcrystalline carbon having the structure of diamond on a metal or ceramics having a desired shape. CONSTITUTION:A base body having a desired shape or a plate-shaped substrate is made of a metal or ceramics. A film of microcrystalline carbon having the structure of diamond is formed on the surface of the base body or the substrate to obtain a metallic or ceramic composite body having a wear resistant surface.
申请公布号 JPS62167886(A) 申请公布日期 1987.07.24
申请号 JP19860277519 申请日期 1986.11.19
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H01L21/205;C23C16/26;C23C16/27;C23C16/50;C23C16/511 主分类号 H01L21/205
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