发明名称 |
COMPOSITE BODY HAVING CARBON FILM |
摘要 |
PURPOSE:To improve the adhesion and hardness of the film of the resulting composite body by forming a film of microcrystalline carbon having the structure of diamond on a metal or ceramics having a desired shape. CONSTITUTION:A base body having a desired shape or a plate-shaped substrate is made of a metal or ceramics. A film of microcrystalline carbon having the structure of diamond is formed on the surface of the base body or the substrate to obtain a metallic or ceramic composite body having a wear resistant surface.
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申请公布号 |
JPS62167886(A) |
申请公布日期 |
1987.07.24 |
申请号 |
JP19860277519 |
申请日期 |
1986.11.19 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI |
分类号 |
H01L21/205;C23C16/26;C23C16/27;C23C16/50;C23C16/511 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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