摘要 |
PURPOSE:To make it possible to enhance the accuracy of slide of a static pressure fluid bed, by providing fluid supply ports opened among a slide rail, a slide bed body and a slide abutting plate so that pressure fluid streams whose flow rates are independently regulated are supplied onto the slide surface of the rail. CONSTITUTION:A slide rail 3 is formed therein with three flow passages 7 with which fluid supply ports 3a, 3b 3c opened to the slide surface of the slide rail 3 are communicated. Pressure fluid from a pressure fluid supply source is fed into gaps among the slide rail 3, a slide bed body 4 and a slide abutting plate 6 through the passages 7 and the fluid supply ports 3a, 3b, 3c. Further, the slide bed body 4 and the slide abutting plate 6 are subjected to the static pressure of the fed pressure fluid and therefore supported being floated from the slide rail 3, thereby it is possible to remarkably reduce the slide resistance thereof. |