发明名称 POLISHING DEVICE
摘要 PURPOSE:To easily obtain a high precision polished-surface by arranging a controller which varies the rotating speed of a polishing tool by a signal from a position detecting unit of the polishing tool in a polishing device for optical element. CONSTITUTION:A work 12 is fixed on a work supporter 14. Abrasive powder is supplied from an abrasive powder supply means 22, and the work 12 and a polishing tool 28 are rotated. A signal detected with a position detecting unit 37 is inputted into a processing unit 39 and a column 32 is reciprocated with a slide guide 36 to reciprocate the tool 28. A hook 21 is unhooked and an arm 31 is rotated counterclockwise to place the tool 28 on the work 12 and to polish the work by applying the weight of the tool to the work. The processing unit 39 controls the rotating speed and the feed speed by the input signal from the position detecting unit 37 so that a previously set polishing condition is obtained. Since the rotation speed and the feed speed are controlled to obtain a desired polishing amount by the position of the tool 28, a precision polished-surface can easily be obtained.
申请公布号 JPS62162465(A) 申请公布日期 1987.07.18
申请号 JP19860004174 申请日期 1986.01.14
申请人 CANON INC 发明人 NAKAMURA NOBUO;ANDO MANABU
分类号 B24B37/07;B24B37/10;B24B49/00 主分类号 B24B37/07
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