摘要 |
PURPOSE:To obtain a measuring device which is scarcely influenced by a scattered light, by irradiating an exciting light to the surface of a solid-state sample, and fetching a fluorescence from the reverse side of the solid-state sample. CONSTITUTION:A light beam which has been emitted from a xenon lamp 10 is condensed by a lens 12, and goes into an exciting side spectroscope from an incident slit 14. Subsequently, a monochromatic light which has been dispersed by a concave surface diffraction grating 16 is reflected by a mirror 20 through an emitting slit 18, condensed by a lens 22 and made incident on a solid-state sample 24. In this state, a fluorescence side spectroscope is formed by a condensing lens 30, an incident slit 32, a concave surface diffraction grating 34, and an emitting slit 36, and the reverse side of the sample 24, namely, other surface than an exciting light incident surface is observed. A scattered light by the sample 24 is usually radiated to the surface side of the solid by 90% or more, and its 10% or less is radiated to the reverse side. Accordingly, the light beam which has been brought to a spectral processing by the fluorescence side spectroscope is photodetected by a photoelectric multiplier 40 through a mirror 38, but since the fluorescence is observed from the reverse side, therefore, an influence of the scattered light is reduced extremely.
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