| 摘要 |
PURPOSE:To keep discharge stable, and to improve the efficiency of laser oscillation by connecting discharging resistors in parallel with both ends of a DC high-voltage power supply, one end thereof is grounded, through a main capacity and a spark gap switch, and connecting a peaking capacity and a gas laser tube in parallel through a coil and a saturable reactor in series. CONSTITUTION:When a switch 13 is triggered and conducted, a laser tube 17 is supplied with the charging charges of a capacity 12. The charging rise of a capacity 16 is delayed by a coil 15 at that time, and preliminary ionization is conducted sufficiently by means of a trigger electrode 18 during the rise. A saturable reactor 19 is turned ON because of large discharging currents at that time, and currents are regulated only by the coil 15. When main discharge is generated by the laser tube 17 and discharging currents are reduced, the saturable reactor 19 is turned OFF, and regulates currents in cooperation with the coil 15. Consequently, voltage between main electrodes for the laser tube is not oscillated and gradually approaches to zero potential. Accordingly, no arc discharge is generated, and the laser tube maintains stable discharge. Discharging resistance 14 can be increased sufficiently, and loss in the resistor 14 is reduced, thus improving the efficiency of laser oscillation. |
