发明名称 SEMICONDUCTOR PRESSURE SENSOR
摘要 PURPOSE:To avert the stress concn. to a silicon pedestal and to prevent the cracking or breakdown of the silicon pedestal by connecting a metallic stem and can be using a solder brazing filler metal. CONSTITUTION:Lead tin solder 21 is used as the brazing filler metal and the metallic stem 3 is connected to a windowed cap 7 by said solder. More specifically, the lead tin solder is molded to an annular shape and the molded solder is placed on a collar part 3a of the metallic stem 23; further the windowed cap 7 is put thereon. The solder is then melted in a vacuum by using IR rays or is heated to melt in hydrogen or hydrogen forming gas or if a flux is incorporated into the solder, the solder is heated to melt in air or nitrogen, by which the metallic stem 3 and the windowed cap 7 are adhered. The subsequent stages for assembling the sensor after the end of the adhesion are exactly the same as the conventional stages for assembling the sensor.
申请公布号 JPS62148828(A) 申请公布日期 1987.07.02
申请号 JP19850291081 申请日期 1985.12.24
申请人 MITSUBISHI ELECTRIC CORP 发明人 ISHIBASHI KIYOSHI
分类号 H01L29/84;G01L9/00;G01L9/04 主分类号 H01L29/84
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