| 摘要 |
PURPOSE:To improve an electromagnetic conversion characteristic by having two-layered film structure consisting of a vertical magnetic recording layer and soft magnetic layer and providing a nonmagnetic intermediate layer between the two layers. CONSTITUTION:The soft magnetic layer S is a thin soft magnetic film having an isotropic magnetic characteristic within the surface and the nonmagnetic intermediate layer T having >=5Angstrom and <=30Angstrom thickness is disposed between the soft magnetic layer S and the vertical recording layer R. A thin Ti film is used for the nonmagnetic intermediate layer T and in addition, thin films of oxides such as iron oxide, cobalt oxide and chromium oxide or thin org. films are also usable. The soft magnetic layer S, the intermediate layer T and the recording layer R are respectively formed by a sputtering method, vacuum deposition method, plating method, etc. The three layers are preferably continuously and successively formed by the sputtering method or vacuum deposition method within the same vacuum vessel in order to improve the adhesiveness among the respective layers.
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