| 摘要 |
PURPOSE:To provide a gas laser device in which a glow discharge to a laser tube is homogenized in a simple structure by winding a coil to which a high frequency current is supplied on the outside of the laser tube. CONSTITUTION:A high frequency current flows to a coil 15, and energy is stored in the form of a magnetic field in the coil 15 including a laser tube 5. A preliminary discharge is started by an electric field generated on the basis of a timing change of the magnetic field for a main discharge area of a cathode 3 and an anode 4 which are energized in advance. A main discharging area becomes ready to discharge by the preliminary discharge so that the main discharge starts. Since the electric field generated in a gas laser tube becomes strong proportionally to a distance along the radial direction, it can prevent the glow discharge from being concentrated to be homogenized since it is considered that a tube wall is more ready to be discharged than the center. |
