发明名称 |
Providing of gases for an excimer laser |
摘要 |
A method of reducing an expenditure of a rare gas in an excimer laser system includes evacuating a lasing material including a mixture of diluent rare gas and removing therefrom halogen compounds. Supplemental lasing material is then added to the lasing mixture.
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申请公布号 |
US4674098(A) |
申请公布日期 |
1987.06.16 |
申请号 |
US19850740024 |
申请日期 |
1985.05.31 |
申请人 |
TURNER, ROBERT |
发明人 |
TURNER, ROBERT |
分类号 |
H01S3/036;H01S3/225;(IPC1-7):H01S3/22 |
主分类号 |
H01S3/036 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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