| 摘要 |
A continuous ionizer adapted to introduce selected ions into a continually flowing stream of liquid. To ensure that a maximum concentration of ions is incorporated, the continuous ionizer is configured so that turbulent and intimate mixing of the ionizing gas and liquid to be ionized occurs. The flow of ionizing gas is regulated by a liquid level sensor to prevent a gas/liquid mixture from proceeding downstream from the ionizer. The apparatus and method of this invention are particularly suited to situations where deionized water is used in a process which causes undesired static electricity discharges, and clean, ion-possessing water is preferred, such as semiconductor processing.
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