| 摘要 |
PURPOSE:To minimize a dead space, secure a large capacity in a compression chamber, and improve the efficiency of a pump by making a vacuum pressure act on the operating gaseous body chamber side of a diaphragm provided in a pump chamber, and enabling said diaphragm to be closely attached to the inner wall of said pump chamber. CONSTITUTION:The SOL 2 of a feed and discharge selector valve 17 connected to a vacuum tank 19 which is kept in vacuum by means of a vacuum pump 20, is in an energized condition and compressed air in a compressed air source 18 is fed into a second operating air chamber 9 through a feed and discharge pipe 16B, to press a diaphragm 7 leftward. On the other hand, the inside of the first operating gaseous body chamber 6 of a first pump chamber 2 side is connected to the vacuum pump 19 side through a feed and discharge pipe 15A, and a first diaphragm 4 is pressed against, and closely attached to, the inner wall of the first pump chamber 2, thereby, minimizing a dead space while securing large capacities of compression chambers 5, 8, to improve the efficiency of a pump. The compressed air is discharged into a piping line 13 while on the other hand, since the inside of the suction compression chamber 5 becomes a negative pressure, a material liquid is sucked in, thereby, enabling feed out of a high pressure material liquid.
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