摘要 |
PURPOSE:To remarkably improve optical quality of a quartz glass, by heating glass material or glass precursor at 1,500-2,200 deg.C in the synthesis of a quartz glass by sol-gel process and maintaining the glass, etc., to the temperature for a specific period. CONSTITUTION:A sol solution containing a silicon compound is gelatinized and dried and the pores of the produced dry gel are closed to obtain a glass material or glass precursor. The glass material or glass precursor is heated at 1,500-2,200 deg.C and maintained to the temperature for a specific interval to obtain a quartz glass. A quartz glass having extremely excellent optical quality and usable as a substrate or photo-mask and an optical fiber preform can be produced in large quantities by this process. |