| 摘要 |
PURPOSE:To manufacture high quality diamond state carbon film with a good mass productivity in crystalline plane with a good reproducibility using simple equipment, by utilizing a specified method for forming film while using hydrocarbon compd. as material having structure similar to diamond or graphite. CONSTITUTION:Hydrocarbon compd. having a structure similar to diamond or graphite, or mixture of these is used as material, and gasified by plasma chemical gas phase vapor deposition (CVD) method or thermal decomposition method to obtain a product. This is accumulated on substrate to obtain carbon film. Benzene, adamantane, nobornadien or compd. of these are desirable to the material. Mixed gas obtd. by adding gaseous hydrogen to the material is desirable as the gasified material. Further it is desirable to form carbon film by plasma CVD method and to arrange the substrate on cathode. |
