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发明名称
ETCHING METHOD
摘要
申请公布号
JPS6297332(A)
申请公布日期
1987.05.06
申请号
JP19860254060
申请日期
1986.10.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
UENO ATSUSHI;KUNINOBU SHIGERO;ISHIHARA TAKESHI
分类号
H01L29/78;H01L21/302;H01L21/3065
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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