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发明名称
CHARGED BEAM EXPOSURE DEVICE
摘要
申请公布号
JPS6293931(A)
申请公布日期
1987.04.30
申请号
JP19850232313
申请日期
1985.10.19
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
TAKAMOTO KIICHI;OKUBO TSUNEO;KURIHARA KENJI
分类号
H01L21/027;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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