DRIER FOR WAFER,申请号JP19850231853-传众专利搜索

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发明名称	DRIER FOR WAFER
摘要
申请公布号	JPS6292325(A)	申请公布日期	1987.04.27
申请号	JP19850231853	申请日期	1985.10.17
申请人	NEC CORP	发明人	TOKUYOSHI FUJIKI
分类号	F26B19/00;F26B5/00;H01L21/304	主分类号	F26B19/00
代理机构		代理人
主权项
地址

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