发明名称 Continuous vapor phase processing machine
摘要 A continuous vapor phase processing machine of the type wherein work is selectively heated by a processing vapor in a processing vapor zone to a selected temperature for vapor phase processing. The machine has a tank containing a processing vapor, and a throat is in communication with the tank. The throat communicates with the air, and cooling coils extend along at least a portion of the throat. Openings are defined in the throat across the throat at a location substantially spaced from the outer end of the throat and a manifold communicates with these openings. Means are connected to the manifold for drawing air from the throat through the openings defined in the throat and for removing processing vapor therefrom, the flow of air being drawn into the throat through the throat exit aperture and being pulled through the opening comprising a barrier to the flow of processing vapor to the throat exit aperture.
申请公布号 US4658513(A) 申请公布日期 1987.04.21
申请号 US19850771697 申请日期 1985.09.03
申请人 DYNAPERT-HTC CORPORATION 发明人 STRATTMAN, WAYNE P.
分类号 B01J19/00;B23K1/015;C23G5/04;H01L21/302;H01L21/3065;(IPC1-7):F26B15/18 主分类号 B01J19/00
代理机构 代理人
主权项
地址