| 摘要 |
PURPOSE:To make it possible to detect the position when a stepped part is present, by changing the relative position relationship between an ultrasonic-wave transmitting and receiving element, which is obliquely provided with respect to the central axes of the holes of a material to be measured, and the material to be measured, and detecting the change in the amount of offset, which is obtained by processing the reflected light. CONSTITUTION:A manipulator 48 is controlled along two perpendicularly intersecting axes X and Y by a manipulator control device (not shown) of a position detecting device so that the manipulator can be moved. An ultrasonic wave transmitting and receiving element 49 is provided on the manipulator 48. The wave transmitting and receiving surface of the wave transmitting and receiving element 49 is independently inclined by 10 deg. with respect to the central axes of holes to be measured 58 and 64 of a material to be measured 57 having a stepped part along the Axes X and Y. An ultrasonic wave beam 59 is transmitted from the wave transmitting and receiving element 49. The element is moved along the X axis and the Y axis, and sensing is performed. The amount of changes in offset quantities delta1 and delta2 from the intersections 60-63 of the center of the beam 59 and the material to be measured are detected. The positions of the holes to be measured 58 and 64 are computed by a data processing control device (not shown). |
