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发明名称
VAPOR GROWTH DEVICE
摘要
申请公布号
JPS6274078(A)
申请公布日期
1987.04.04
申请号
JP19850215487
申请日期
1985.09.27
申请人
APPLIED MATERIALS JAPAN KK
发明人
MAEDA KAZUO;TOKUMASU TOKU;FUKUYAMA TOSHIHIKO;MATSUI FUMIYA
分类号
C23C16/44;C23C16/442;C23C16/48;H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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