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发明名称
CLEANING UNIT FOR SEMICONDUCTOR SUBSTRATE CONTAINING BOX
摘要
申请公布号
JPS6273728(A)
申请公布日期
1987.04.04
申请号
JP19850214261
申请日期
1985.09.27
申请人
NEC KYUSHU LTD
发明人
NONAKA HIROSHI
分类号
H01L21/304;B08B9/08;B08B9/36
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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