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发明名称
WAFER POSITIONING DEVICE
摘要
申请公布号
JPS6272137(A)
申请公布日期
1987.04.02
申请号
JP19850211691
申请日期
1985.09.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOMIDOKORO MAKOTO
分类号
H01L21/68;H01L21/67
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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