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发明名称
EVAPORATING SOURCE DEVICE FOR GENERATING VAPOR FLOW IN LARGE VOLUME
摘要
申请公布号
JPS6270576(A)
申请公布日期
1987.04.01
申请号
JP19850209839
申请日期
1985.09.21
申请人
KAWASAKI STEEL CORP
发明人
IGUCHI MASAO;NISHIIKE UJIHIRO;KOBAYASHI YASUHIRO;SUZUKI KAZUHIRO
分类号
C23C14/30;C23C14/56
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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