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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPS6271244(A)
申请公布日期
1987.04.01
申请号
JP19850210021
申请日期
1985.09.25
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD;AKITA DENSHI KK
发明人
TAKASHIMA KAZUHISA;OZAWA MASAKAZU;HOSHINO TOSHIO;KOMABA YUICHI;FUJIWARA SHUNICHI;YOSHIDA MASAHIKO;SASAKI SATOSHI;SHIRAKAWA SEIICHI
分类号
H01L21/677;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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