| 摘要 |
PURPOSE:To obtain a low-cost printing head of good yield and durability, by a method wherein a number of grooves for forming conductive discharge wires are drilled in a side surface of an insulating ceramic substrate and a conductive ceramic is vapor deposited on the overall side surface thereof and thereafter abraded to separately form conductive discharge wires only in the respective grooves. CONSTITUTION:A substrate 1 is formed by using a good insulating ceramic containing 97% of Al2O3, Y2O3, and a slight amount of an additives. Grooves 4 are drilled in the substrate 1 at pitches of 125mum by means of a mechanical grinding etc. On the side surface having the grooves 4, a conductive layer 5 is integrally adhered by means of CVD etc. using a mixed gas of titanium halide, hydrogen, methane, and nitrogen. Thereafter, the conductive layer 5 of TiCN is lapped to reduce its thickness until being separated by the projecting portions of the substrate, thus resulting in discharge wires 3' of conductive ceramic formed in the respective grooves 4. |
