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发明名称
VAPOR SHIELD FOR CONTINUOUS TYPE VACUUM DEPOSITION
摘要
申请公布号
JPS6267171(A)
申请公布日期
1987.03.26
申请号
JP19850205695
申请日期
1985.09.18
申请人
KAWASAKI STEEL CORP
发明人
KOBAYASHI YASUHIRO;IGUCHI MASAO;NISHIIKE UJIHIRO;SUZUKI KAZUHIRO
分类号
C23C14/54;C23C14/56
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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