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发明名称
FORMATION METHOD OF NNTYPE LAYER
摘要
申请公布号
JPS5434767(A)
申请公布日期
1979.03.14
申请号
JP19770100457
申请日期
1977.08.24
申请人
HITACHI LTD
发明人
MURAMATSU AKIRA
分类号
H01L29/73;H01L21/225;H01L21/306;H01L21/322;H01L21/331;H01L29/72
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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