| 摘要 |
PURPOSE:To improve durability and corrosion resistance by providing a protective layer consisting of an org. high-polymer compd. into which at least carbon atoms and nitrogen atoms are incorporated and the concn. of the nitrogen atoms in the surface layer is adjusted to >=40 atom% with regard to the concn. of the carbon atoms on a thin ferromagnetic metallic film layer and providing a lubricating agent layer on the protective film layer. CONSTITUTION:The protective film layer consisting of the org. high-polymer compd. contg. the carbon atoms is formed on the thin ferromagnetic metallic film layer 12 by exposing the thin ferromagnetic metallic film layer into a gaseous monomer of the org. compd. and executing a plasma polymn. The protective film layer consisting of the org. high polymer compd. into which the carbon atoms and nitrogen atoms are incorporated and the concn. of the nitrogen atoms in the surface layer is adjusted to >=40 atom% with regard to the concn. of the carbon atoms is further provided thereon by exposing the layer 13 to the gaseous monomer or an amino compd. or the gaseous monomer contg. gaseous nitrogen and executing a plasma treatment. The lubricating agent layer is further provided thereon. The lubricating agent layer 14 is thereby securely deposited on the protective film layer consisting of the org. high-polymer compd., by which the coefft. of friction is made substantially small and the running property and durability are improved. |
