| 发明名称 |
APPARATUS FOR MEASURING IMPURITIES IN ULTRAPURE WATER |
| 摘要 |
<p>A novel apparatus is provided for measuring the number of sizes of micro impurities such as fine dust or bacteria floating in ultrapure water. The apparatus is improved over the electrical pulse method for a high detection sensitivity and high precision and which does not operate erratically.</p> |
| 申请公布号 |
CA1218870(A) |
申请公布日期 |
1987.03.10 |
| 申请号 |
CA19840448449 |
申请日期 |
1984.02.28 |
| 申请人 |
ERMA OPTICAL WORKS, LTD. |
发明人 |
SHIRATO, KOZO;KAWASHIMA, KAZUYASU;SATO, YOSHIHIRO |
| 分类号 |
G01N15/12;(IPC1-7):G01N27/00 |
主分类号 |
G01N15/12 |
| 代理机构 |
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