发明名称 SEALING DEVICE FOR GLASS SEALING ELECTRONIC PART
摘要 PURPOSE:To enable a glass sealing with a high efficiency and of high quality by a method wherein a work in a heated condition is tightly bonded on a supporting bed so as to be covered in an airtight condition at the upper portion of the cooling part, and a lower open type pressing chamber is arranged so as to be movable vertically and inert gas is compressed and fed into the pressure chamber. CONSTITUTION:A cylindrical support pillar 21 is erected on the upper surface of a pressurized chamber 20 and the support pillar 21 is made to protrude upward penetrating a housing 19. The chamber 20 is vertically driven extending from its descending position to enter into a furnace cylinder 11 with the expansion and constriction operation of air cylinders 22 and 22 coupled with its protruded ends to its ascending position where it is shifted upward of the furnace cylinder 11 and is accommodated in the housing 19. The pressurized chamber 20 entirely covers a work W just under the housing 19 in its descended state, and at the same time, the whole periphery of the lower end of the chamber 20 is adhered on the upper surface of a supporting bed 10 to form an airtight chamber between the supporting bed 10. The upper end of the cylindrical support pillar 21 is connected to a gas compressor for nitrogen gas which is inert gas to be connected.
申请公布号 JPS6245049(A) 申请公布日期 1987.02.27
申请号 JP19850184915 申请日期 1985.08.22
申请人 ROHM CO LTD 发明人 KURITA YOSHIO
分类号 H01L23/08;H01L21/50 主分类号 H01L23/08
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