| 摘要 |
PURPOSE:To provide high photosensitivity and superior aging stability and to enable preservation for a long period by using a compound which can produce an acid when irradiated with rays of active light and a compound having at least one specified silyl ester group unit decomposable with the acid and showing solubility which is increased in a developer by the action of the acid. CONSTITUTION:This photo-solubilizable composition contains a compound (a) which can produce an acid when irradiated with rays of active light and a compound (b) having at least one silyl ester group unit represented by the formula and decomposable with the acid. The solubility of the compound (b) in a developer is increased by the action of the acid. The preferred weight ratio of the compounds (a):(b) is 0.001:1-2:1. Though the composition may be composed of only the compounds (a), (b), the compounds are preferably mixed with an alkali-soluble resin. Novolak type phenol resin is suitable for use as the alkali-soluble resin. |
