| 摘要 |
PURPOSE:To improve a service life and a reliability, by detecting the flow velocity of gas by a flow meter installed in a gas circuit, and suspending the output of discharge circuit by an interlock mechanism when the flow velocity is detected to be lower than a specified value. CONSTITUTION:The flow velocity of a laser gas 7 is always detected during a laser operation by a sensor 15, and is converted by the main body of a flow meter 16. When the flow velocity of the gas is lower than a suitable value set previously, an interlock mechanism 18 halts a high voltage power source 13, which stops the operation of pulse discharge circuit 12 driven by said power source. At the same time, a signal is sent to an abnormal-state indicater 17 telling the user of the laser the abnormal circulation of the gas. Therefore, it is prevented for the laser output to decrease according to the abnormal circulation of the gas during the repetition of laser operation. Moreover, the damage of main electrodes 1 and 3 caused by an arc discharge can be reduced, because the operation is stopped before the transition from a laser exitation discharge to an arc discharge. |
