| 摘要 |
PURPOSE:To prevent a member such as a reflecting mirror from damaging by providing a branch tube and a leakage water detector for detecting the moisture dropped to the tube in a laser gas circulating passage. CONSTITUTION:When the supply of coolant is forgotten and coolant is supplied from the midway of operation, a discharge tube 1 is already at high temperature, and accordingly cracked to invade the coolant to be mixed with laser gas 5. When this gas is arrived at a branch tube 15, the mixed coolant is dropped to the bottom of the tube 15. The dropped water is detected by a leakage water detector 14 to stop operating of a laser oscillator, to operate valves of an inlet 12 and an outlet 13 of the coolant, thereby stopping supply of the coolant and exhausting the coolant. With this construction, the coolant leakage is rapidly detected to prevent a member such as a reflecting mirror from damaging. |
