| 摘要 |
PURPOSE:To provide a compact fan filter unit by a method wherein a resistor for varying a rate of opening in response to a distribution of blowing air speed of a blower is installed within a plenum chamber between the blower and the filter. CONSTITUTION:Air is supplied to a plenum chamber 4 by a blower 2. Under an action of a punched metal 6 having a low rate of opening in case of a distribution of high air speed and having a high rate of opening at a location where a slow distribution of air speed in response to a distribution of blowing air speed of a blower 2, it is possible to make a uniform distribution of air speed even if the plenum chamber 4 is small, and after the air is filtered by the filter 3, clean air having a uniform distribution of air speed can be supplied. Therefore, it is possible to make a compact fan filter unit. |
