发明名称 |
SOFT X-RAY LITHOGRAPHIC SYSTEM |
摘要 |
Conventional soft X-ray lithographic system employing proximity exposure method is advanced by rendering the system feasibility of reductive projection method which has been proved of its merit in photo-lithography and the present inventive imaging system comprises basically a soft X-ray source which is emissive like a point source, a spherically concaved reflector to converge the soft X-ray onto a Fresnel zone plate (FZP) wherein a mask pattern or an original to be copied is positioned between the reflector and the FZP so that the soft X-ray will transmit through the mask pattern to form a reduced image or copy thereof on a resist coated target substrate. Therefore, the present invention will be most advantageously applied to patterning jobs in IC industry. |
申请公布号 |
WO8700644(A1) |
申请公布日期 |
1987.01.29 |
申请号 |
WO1986JP00376 |
申请日期 |
1986.07.18 |
申请人 |
SHIMADZU CORPORATION |
发明人 |
MAKABE, HIDEKI;IWAHASHI, KENJI |
分类号 |
G03F7/20;G21K1/06;H01L21/027;(IPC1-7):G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|