| 摘要 |
PURPOSE:To bond wirings without thermal damage by locally heating a portion to be wire-bonded by a laser light, and then press-bonding gold wirings to the portion by a supersonic vibration. CONSTITUTION:When an optical box 15 is moved to a position where the optical axis of a light projecting port 21 at the lower surface of the box coincides with the central axis of a capillary 6 and stopped, a laser light source 13 is operated to emit a laser light 18 from the port 21 to a portion 3 to be wire- bonded. When the portion 3 is locally heated to the prescribed temperature, the light source 13 is stopped, and the box 15 is laterally moved. When the box 15 moves, the capillary 6 and a horn 10 move down, the lower end of the capillary 6 pushes the gold sphere of Au wirings 5 to the locally heated part of the portion 3, and press-bonds it by a supersonic vibration. Thus, a wire bonding is performed without thermal damage even with the deterioration of thermal resistance. |
