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发明名称
MANUFACTURE OF THIN FILM PHOTODETECTOR
摘要
申请公布号
JPS627172(A)
申请公布日期
1987.01.14
申请号
JP19850147442
申请日期
1985.07.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUBOI SHUNGO
分类号
H01L31/0248;H01L21/205;H01L31/08
主分类号
H01L31/0248
代理机构
代理人
主权项
地址
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