| 摘要 |
PURPOSE:To prevent the deterioration in the electrical and magnetic characteristics of the title head and to improve the sensitivity by forming a magnetic substance thin film and a coil conductor thin film on respective carrier substrates and then integrating the substrates. CONSTITUTION:An electrically conductive material of metals and alloys is coated on the first carrier substrate 1 consisting of an insulating material and patterned to form a coil conductor thin film 2 and a substrate 3 on the coil side is obtained. Meanwhile, a soft magnetic material of amorphous metals, NiFe alloys, etc., is coated on the second carrier substrate 4 consisting of an insulating material and patterned to form a magnetic substrate thin film 5 and a substrate 6 on the magnetic substance side is obtained. Then the substrate 3 on the coil side and the substrate 6 on the magnetic substance side are integrated while the coil conductor thin film 2 and the magnetic substance thin film 5 are placed on the inside to form a detecting part 7. Consequently, the deterioration in the electrical and magnetic characteristics of the thin film can be prevented and the detection sensitivity is improved. |
