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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS622562(A)
申请公布日期
1987.01.08
申请号
JP19850141127
申请日期
1985.06.27
申请人
TOSHIBA CORP
发明人
SAWADA SHIZUO
分类号
H01L27/10;H01L21/8234;H01L21/8238;H01L27/08;H01L27/088;H01L27/092;H01L29/78
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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