发明名称 Process for depositing a silicon coating on a metal article
摘要 Process for depositing a silicon-based coating of uniform thickness on a metal article by plasma-assisted chemical deposition from a gas, in which the metal articles are placed in an enclosure containing a gas capable of generating, under the effect of an electrical current between electrodes placed in the said enclosure, reactive species containing the elements of the silicon-based coating which will be deposited on the metal articles heated to a temperature above room temperature. The temperature of the gas at the metallic articles is between 300 DEG C and 450 DEG C, the gas pressure is lower than 10 mbar but higher than 0.1 mbar and the articles are arranged on the anode and in electrical contact with the latter, facing the cathode. Application: deposition of a hard and uniform surface layer on steel articles. <IMAGE>
申请公布号 FR2584098(A1) 申请公布日期 1987.01.02
申请号 FR19850009776 申请日期 1985.06.27
申请人 AIR LIQUIDE 发明人 FRANCOIS COEURET, MARIE-HELENE LEGAY ET MICHEL MADSAC;LEGAY MARIE-HELENE;MADSAC MICHEL
分类号 C23C16/02;C23C16/24;(IPC1-7):C23C4/04;C23C8/38 主分类号 C23C16/02
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