发明名称 Arrangement for cooling surfaces
摘要 In cooling thermally very highly stressed surfaces, for example the bottom side of the crucible bottom in an electron beam evaporator, the problem arises that at the hot surface to be cooled the coolant forms vapour bubbles, which severely hinder the cooling. In order to improve the heat removal in a known way by means of a turbulent coolant flow, previously eddy-forming sheet metal deflectors were frequently inserted in the cooling channel, whereby, however, the rate of flow was sharply reduced and consequently vapour bubble formation was promoted. According to the invention, the coolant is introduced at high speed through nozzles tangentially into the coolant space, which exhibits an essentially cylindrical jacket surface, whereby the coolant is set in rotation and removed again via a line arranged in the vicinity of the axis of rotation. The bubble formation is thereby largely suppressed. Application of the invention: especially for surfaces highly heated by corpuscular beam bombardment. <IMAGE>
申请公布号 DE3613801(A1) 申请公布日期 1987.01.02
申请号 DE19863613801 申请日期 1986.04.24
申请人 BALZERS HOCHVAKUUM GMBH 发明人 BUHL,RAINER,DR.
分类号 F25D1/02;C23C14/34;F28F13/02;F28F13/12;H01J37/305;(IPC1-7):F28C3/04;B22D45/00 主分类号 F25D1/02
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