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发明名称
摘要
申请公布号
JPS6161057(B2)
申请公布日期
1986.12.24
申请号
JP19780047904
申请日期
1978.04.24
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
OOHIRA FUMIKAZU;ITAKURA MASAYUKI;MYAKE SHOJIRO
分类号
G01N21/41;H01L21/16;H01L21/66
主分类号
G01N21/41
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