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发明名称
CLEAN CORONA GAS IONIZATION FOR STATIC CHARGE NEUTRALIZATION
摘要
申请公布号
EP2422219(A1)
申请公布日期
2012.02.29
申请号
EP20100767438
申请日期
2010.04.23
申请人
MKS INSTRUMENTS, INC.
发明人
GEFTER, PETER;KLOCHKOV, ALEKSEY;MENEAR, JOHN E.;NELSEN, LYLE DWIGHT
分类号
G01T1/185
主分类号
G01T1/185
代理机构
代理人
主权项
地址
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