| 摘要 |
PURPOSE:To attain to enhance characteristics as a load cell, by forming a polyamide insulating film on an insulating film comprising insulating oxide or nitride between a beam body and a bridge circuit pattern in a superposed state. CONSTITUTION:An insulating layer 10 comprising insulating oxide or nitride is formed to one surface 9 of a beam body 1 by a membrane technique and an insulating layer 11 comprising polyimide is formed thereon in a thin film form by a spinner means. Further, a strain gauge layer 12, a temp. correcting resistor layer 13 and a lead pattern layer 14 are successively laminated by photoetching. A bridge circuit pattern 19 is constituted of a strain gauge 15, a temp. correcting resistor 16, a lead wire part 17 and a terminal part 18. In this constitution, because the insulating film of the insulating layer 10 is an inorg. substance, characteristics as a load cell, that is, non-linearity, hysteresis and creep characteristics can be enhanced.
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