| 摘要 |
PURPOSE:To obtain an inspection apparatus having excellent heat resistance, observing range and maintenability, by using an image guide, which is provided with a winding mechanism instead of an ITV camera, and constituting an arm driving system so that an image sensor part can be placed in an arbitrary position in a vacuum container. CONSTITUTION:A driving part 1 drives a main body part 5a of an arm in the direction of the axial center (Z axis) of a tubular structure 2, turns an arm tip part 5b around the Z axis through an arm turning part 6, winding a driving wire 5c, thereby moves an observing part 7, which is mounted on a movable block 20, along the axis of the tip part 5b. An image guide winding mechanism 14 is provided so that the loose part is not yielded in an image guide 8 when the position of the movable block 20 is changed. A joining and supporting part 15 is provided in order to support the up and down movement of the main body part 5a in the direction of the Z axis and the turning movement around the Z axis so that they are slidden freely. The structure 2 is linked to a port 4a, and the driving part 1 is controlled by an operation board 10. Thus the observation can be performed by the observing part 7. Therefore, the inspecting apparatus having the excellent observation range and maintenability can be obtained. |
