| 摘要 |
PURPOSE:To make it possible to maintain a highly stable dust arresting effi ciency for a long period of time by providing a spray mechanism for spraying water within a casing on an upstream side of an air filter. CONSTITUTION:A spray nozzle 6 is disposed within a casing 1 so that it opposes an air current, and water within a water feed tank 8 is sprayed into the casing 1. Air filters 12, 13 and 14, for coarse dusts, of middle capacity and high capacity, respectively are disposed from the upstream side to the downstream side, within the casing 1, via an eliminator 10 and a mist removing filter 11. Almost all the sea salt particles within the external air sucked up within the casing 1 and a part of other dusts and dirts are dissolved into water sprayed through the spray nozzle 6 and precipitate on the floor of the casing 1. Unprecipitated sprayed water is removed by the eliminator 10 and the mist removing filter 11, and is exhaust from an exhaust port 15 via an exhaust pipe 16 to the outside of the casing 1. Air passes through three kinds of air filters 12, 13 and 14 and is blown off into the clean room through a blow-off port 3.
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