| 摘要 |
PURPOSE:To always stabilize electric, optical, and photoconductive characteristics by incorporating Ge, a conductivity governing substance, and O in a photoconductive layer in a specified distribution. CONSTITUTION:A light receiving layer is formed by laminating the first photoconductive layer 102 of an amorphous material made of Si as a matrix, and the second layer 103 of an amorphous material made of Si as a matrix containing C and a conductivity governing substance on a substrate 101. In the light receiving layer, Ge is incorporated into a partial layer region in contact with the substrate 101 in a uniform distribution, the conductive governing substance is incorporated into the whole or partial layer region of the first layer in a uniform distribution, and O is incorporated into the whole or partial layer region of first layer in a nonuniform distribution, and when needed, into the second layer in a uniform distribution. |
