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发明名称
PROJECTION PRINTING
摘要
申请公布号
GB2146133(B)
申请公布日期
1986.12.03
申请号
GB19840018929
申请日期
1984.07.25
申请人
* CANON KABUSHIKI KAISHA
发明人
KAZUO * TAKAHASHI
分类号
H01L21/30;G03F7/20;G03F7/207;G03F7/22;G03F9/00;H01L21/027;(IPC1-7):G03B27/52
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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