| 摘要 |
PURPOSE:To make stable attracting operation performable all the time, by forming a space on a table into effectiveness so as to cause each attractive pipe, temporarily attracts and clamps a work and an inspected body, to be radially and retractably driven, and making the table miniaturizable. CONSTITUTION:LSI chips 35 being orderly arranged in the tray or the like placed at the specified position with an actuator or the like are mounted on a positioning device 13a on a position unit 11a of a first station. Next, a table 10 is rotated as far as a 1/4 time counterclockwise, and the unit 11a is stopped at a second station in a position where a unit 11b has stopped, performing the same positioning as the first station, and after these chips 35 are positioned right, attractive pipes 27a and 27b are retracted and removed from an attractive hole 14a. During this while, at the first station, feed of these chips 35 and their tmporary positioning are carried out. And, after regular positioning is over, the table 10 is rotated by 1/4, and the unit 11a is stopped at a third station whereby inspection of scratches and the like in each chip 35 is performed, and discrimination between quality articles and rejects takes place. |
